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Top-emission organic light emitting diode with indium tin oxide top-electrode films deposited by a low-damage facing-target type sputtering method
To confirm the effectiveness of the low-damage facing-target sputtering (FTS) method for the deposition of a transparent oxide electrode film on an organic layer, an indium tin oxide (ITO) top electrode was deposited via FTS, and a top emission organic li
Yoji Yasuda, Shinichi Kobayashi, Takayuki Uchida, Yoichi Hoshi
Thin Solid Films (Elsevier）
https://doi.org/10.1016/j.tsf.2020.137868
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