Thermal crystallization kinetics and crystallite size distribution of amorphous ITO film deposited in the presence or absence of water vapor

ENG

Meihan Wang_ Yutaka Sawada_ Hao Lei_ Yoshiyuki Seki_ Yoichi Hoshi_ Takayuki Uchida_ Takayuki Konya_ Akira Kishi

2010-03

6th International Symposium on Transparent Oxide Thin Films fo Electronics and Optics (TOEO-6)_ Tokyo Fashion Town (TFT) Building_ Ariake; Proceedings [CD-ROM version]

0

A162

2009