Thermal change of amorphous indium tin oxide films sputter-deposited in water vapor atmosphere

ENG

M.H. Wang_ Y. Onai_ Y. Hoshi_ H. Lei_ T. Kondo_ T. Uchida_ S. Singkarat _T. Kamwanna_ S. Dangtip_ S. Aukkaravittayapun_ T. Nishide_ S. Tokiwa and Y. Sawada

Thin Solid Films

516

5809-5813

2008