Spray CVD of indium-tin-oxide thin films on non-flat substrates at different temperatures

ENG

Takeshi Kondo_ Yutaka Sawada_ Kensuke Akiyama_ Hiroshi Funakubo_ Takanori Kiguchi_ Shigeyuki Seki_ Meihan Wang and Takayuki Uchid

2007-05

5th International Symposium on Transparent Oxide Thin Films for Electronics and Optics _ (2007.5)

国際会議プロシーディング

p.47

2007