Academic Theses
Title
Summary
ENG
ENG
ENG
Date of Issue
Magazine(name)
Volume
Page
ENG
ENG
ENG
Basic information
Name
YAMADA Katsumi
Title
半導体構造プロセスを用いないMEMSの構築と応用
Summary
ENG
ENG
ENG
ENG
Date of Issue
2009-03
Magazine(name)
発明評価委員会（大学継承）
Volume
39753
Page
2009-85480
ENG
ENG
2008
ENG
