We consider big size fluidic circuits are required for energy harvesting and water splitting area using quartz glass. Quartz glass has high transparency but inside fabrication is difficult. If we can fabricate inside fluid circuit with very smooth surface efficiently, it is very useful for these applications. We researched efficient and high accuracy fabrication method using dry and wet femtosecond laser fabrication combined with chemical assist etching. First, inside part is fabricated by dry rough fabrication. This process changes the property of inside large area and these areas are removed by chemical etching. Finally, surfaces of inside circuit are fabricated by wet femtosecond laser fabrication.