Academic Theses

Basic information

Name SONE Junji

Title

Feasibility study of carbon material MEMS

Summary

 

ENG

ENG

ENG

J. Sone_ M. Henmi_ K. Totsu_ S. Tanaka_ H. Hukushi_ M. Esashi

Date of Issue

2012-02

Magazine(name)

2nd International Symposium on Integrated Microsystems

Volume

0

Page

0

ENG

 

ENG

2011

ENG