Thermodynamic Temperature and Density of Ar(I) for 4S'[1/2]0 State in a Facing Target Sputtering System

ENG

Yoji Yasuda, Nobuo Nishimiya, Yoichi Hoshi, Masao Suzuki

2009-11

Acta Physica Polonica A

Vol. 116 No 4.

2009