Reactive Sputter Deposition of WO₃ Films by Using Two Deposition Methods

ENG

Yoji Yasuda, Yoichi Hoshi, Shin-ichi Kobayashi, Takayuki Uchida, Yutaka Sawada, Meihan Wang, and Hao Lei

2019-05

Journal of Vacuum Science Technology A

Vol.37 3

2019