Basic Sputtering Process and Ferroelectric Properties of Single-domain Single-crystal Thin Films of PbTiO3

ENG

K. Wasa_ Y. Haneda_ T. Sato_ H. Adachi_ I. Kanno_ D. G. Schlom_ S. Trolier-McKinstry_ Q. Gan_ and C. B. Emo.

1998-07

Integr. Ferroelectr.

Vol. 21

pp 451-4690

1998